Products

UHV/UHP Semiconductor

The Helicoflex line of UHP/UHV & semiconductor seals includes our MSM/"Snake eye," Ultraflex, Spring Energized Helicoflex Seal and Quick Disconnect System.

Materials Stocked:

Aluminum, Silver, Copper, Nickel and Stainless Steel

Materials Available on Request:

Inconel, Tantalum, Gold, Hastalloy, Monel, Titanium, Waspalloy, etc.
Can be manufactured in other alloys as required

Typical Applications:

Accelerators/Fusion Research
- Quartz windows/ceramic flanges
- FR wave guide connections
- Cryogenics/superconducting magnets
- Beam tube connections
PVD/CVD/Etch tools
- Flange connections : SS to SS, SS to Aluminum
- UHV pump/chamber connections
- Gate/slit valves
- Standard ISO flanges
Gas/Chemical Delivery Systems
- Modular gas systems: surface mount components
- Mass flow controllers
- Flow control components
- Chemical delivery canisters
- Flange connections

Performance Characteristics:

Sealing Level: 1 x 10-13 cc/sec He
Temperature: -450° F to 1292° F
Pressure: Ultra high vacuum to 50,000 psi (100,000 psi under special conditions)
Low outgassing
Excellent corrosion resistance and shelf life
Excellent spring back compensates for thermal and pressure cycling and Compression relaxation

Additional Information:

Available in a wide ranges of shapes, sizes and materials
Diameters from 0.250" to over 80"
Cross sections from 0.063" to over 0.625"
Works in a range of assemblies:
- Metal/metal with groove
- Flat flanges with limiter/retainer
- ANSI, ISO, KF, and ASA flanges
- May be used with Aluminum, Quartz and Ceramic flanges

Sealing Concept:

The delta type Helicoflex seal is an elastic metal seal with the benefits of an elastomer and traditional metal seal. The seal is composed of a helical spring with ductile outer metal jackets which yield under compression to create a seal by filling flange imperfections and assuring face to face contact of the sealing surfaces. The helical spring has a specific compression resistance and provides an elastic force where each spring coil acts independently, insuring maximum sealing. This is similar to our Helicoflex seal but the Delta type uses two small ridges or "Deltas" on the face of the seal. The concentrated contact area substantially reduces the load required to compress the seal.