Market Applications

Semiconductors

Helicoflex provides a range of high performance sealing technologies to the semiconductor industry. Prominent seal designs are:

LTS

The Helicoflex LTS Seal was specifically designed for modular surface mount components on gas delivery systems. It can be purchased as individual seals or in retainers for easy handling and proper placement. Retainers are available in many configurations or designed to suit customer requirements.

Ultraflex & Delta Seals

Ultraflex and Delta seals have been designed for moderate to low load applications in extreme conditions that require low helium leak rates and ultra high purity.

Markets:

Chemical vapor deposition
Physical vapor deposition
Gas / chemical delivery
Mask / reticle processing
Ultra high vacuum
Ultra high purity
Wafer inspection equipment
Wet and rapid thermal processing
Photolithography
CMP

Applications:

Flow control components
Mass flow controllers
Standard ISO connections
Quick disconnect flanges
Turbo pumps
Quartz windows / end point windows
Ceramic flanges and KF flanges
Dry gas
Chemical delivery canisters / ampoules
Pump / chamber ports (shaped, UHV, etc.)
Gate / slit valves
Flange connections
Wafer carrier actuators, CMP actuators and valve actuators
Wet bench door seals
E-beam guns
Chamber interface seals